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MEMS an overview and application
The physical dimension of a mems can range from several millimeters to less than one. Web microelectromechanical system (mems), mechanical parts and electronic circuits combined to form miniature devices, typically on a semiconductor chip, with dimensions from. Web mems refers to technology that allows mechanical structures to be miniaturized and thoroughly integrated with electrical circuitry, resulting in a single physical device that is actually more like. Web what is mems technology?
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